Inline AFM (IPMS-CNT10.1; IPMS-CNT10.3) - PR908005-2480-P

1 piece Inline AFM

Complete Atomic Force Microscope system for up to 300 mm wafer metrology, consisting of decoupled XY & Z AFM scanners using flexure guided scan system for all three axes: The tool to be purchased for the 300mm cleanroom should be able to be used within the semiconductor production line for rapid characterization of wafers. The focus here is on the parameters of roughness, structure height, widths (critical dimension) and sidewall angles. It should also be possible to carry out a defect review in order to determine their morphological properties. The system must function fully automatically and also be able to record electrical parameters (e.g. capacities from fF ranges to several hundred pF). The handling system and all parts in contact with the wafer must meet the defined contamination levels in order to be able to process the wafers further.

optional service items: 2.2.15 Warranty extension Please offer an extension of the warranty of further 12 months. During the warranty period all support, repair and parts cost are covered and free of charge. please confirm, yes/no 2.2.29 General Equipment Requirements The AFM must be able to handle smaller probes manually for measurement (e.g. 200mm wafer, pieces of wafer). There has to be an access to the stage area to place the probe manually. A measurement has to be possible by using tool software. No automated handling needs to be done. please specify - yes/no 2.4.7 Cassette and wafer specifications Wafer thickness 650 µm - 1500 µm - yes/no 2.7.2 Wafer Handling/Transfer/Loadlock There are no interferences between handling system and substrate except of outer ring of 10mm.This could be realized by using full edge grip or similar (incl. handling, prealigner, chuck vacuum, ...) or as switchable configuration by recipe or easy (intuitive) switch by operator. please specify and confirm - yes/no 2.7.4 Wafer Handling/Transfer/Loadlock equipment has a video monitoring system device for system operation monitoring please specify and confirm - yes/no 2.12.16 sustainability provides modi for power reduction during standby time please specify - yes/no 2.12.17 sustainability provides power measurement system for tracking of power consumption please specify - yes/no 2.12.18 sustainability Confirmation and submission of the provider's certification in accordance with the sustainability standard ISO 14001 - Environmental Management System please specify - yes/no