High-Res X-Ray CT (IZM-74.1) - PR866473-2590-P

1 piece: An X-ray tomograph is to be procured that demonstrably achieves a spatial resolution of <500nm. This must be available over a large acceleration voltage range of 30-150KV. In addition, this resolution must also be achievable at large distances between the X-ray source and the sample due to the sizes commonly used in electronics. Furthermore, when qualifying the encapsulation of electronic components, it must be possible to image weakly absorbing filling particles and the materials used in the AVT (e.g. aluminum bonding wire) well and in detail. Metrological evaluations of the data sets such as the size and position of the recorded effects/structures, the number and volumes of irregularly shaped particles and the roughness of hidden surfaces. In-house training/instruction at the IZM is to be offered for the device users.

Optional features: - Insitu load unit (e.g. for thermal and/or mechanical loads) (LV item 1.5)

- Collision protection for system and sample (LV item 1.6)

- Advanced training for at least 3 persons (LV item 6.2)

- After a repair case has been identified by an employee (hot line), a service technician is on site within one working week (LV item 7.1)