SEM in-situ nanoindendation system (IMWS-12.1) - PR876546-2690-P

The Fraunhofer Institute for Microstructure of Materials and Systems IMWS researches the application behaviour, reliability, safety and lifetime of innovative materials in components and systems. The Business Unit "Electronic Materials and Components" Fraunhofer IMWS support industry and research partners by its internationally recognized expertise in failure analyses of electronic components. Fraunhofer IMWS will enhance its capabilities for advanced failure analysis and material characterization to support the ramp up of new heterogenous integration technologies addressing the manufacturing and reliability challenges. Indentation testing is a versatile approach for the local analysis of micromechanical material properties like elasticity, plastic properties, but also for the evaluation of strength properties. To further enhance test capabilities at Fraunhofer-IMWS for micro-electronic applications, 3D integrated architectures, MEMS systems and micro-mechanical test structures an increased local positioning accuracy is needed to characterize and quantify mechanical data, process properties or reliability properties. Therefore, nanomechanical SEM in-situ indentation technique combines the benefit of enhanced nano-mechanical characterization with the image resolution of a SEM.

Optionen: 1.5.2 Dynamic mechanical analyses for determination of the complex modulus (storage / loss modulus) 1.7.2 state of the art PC with full integrated graphical user interface based min on Win10 1.9.4 Sphere indenter (size tbd.) 1.10.7 2-year warranty