Precise local milling & polishing System with 3D capability and thickness meas (IMWS-07.1) - PR820544-2690-P

1 Piece Precise local milling & polishing System with 3D capability and thickness meas

The Fraunhofer Institute for Microstructure of Materials and Systems IMWS researches the application behaviour, reliability, safety and lifetime of innovative materials in components and systems. The Business Unit "Electronic Materials and Components" Fraunhofer IMWS support industry and research partners by its internationally recognized expertise in failure analyses of electronic components. Fraunhofer IMWS will enhance its capabilities for advanced failure analysis and material characterization to support the ramp up of new heterogenous integration technologies addressing the manufacturing and reliability challenges. To eneable a precise mechanical preparation procedure a specialized depackaging tool is proposed. The system should be a precision grinding 5 axis CNC machine for mechanical preparation of microelectronic devices. The CNC system should be built up as and orthogonal XYZ system with the sample to prepare fixed in in XY-orientation and two additional tilt mechanisms for X- and Y-axis. To estimate the residual thickness of the milled substrate (i.e. Silicon) a second tool for measuring through the substrate is needed. This can be done optically. Because Silicon is only transparent in visible spectrum at a thickness of smaller than 1µm, an optical thickness measuring instrument in the wavelength of Infrared range and in visible range is neccessary.

Options: 1.1.7 Optional: an additional specimen holder should be offered Optional: pneumatic or electric tool changer for fast and tool-free changing of milling or polishing tools 1.5.2. optional: additional cameras for live monitoring of the milling process 1.8.1 "A dust extraction system should be offered for the extraction of dust and particles during dry milling. It must be equipped with a HEPA filter system of at least class H13. The system should be operated with 230V / 50Hz." 1.12.2 The supplier shall offer optional initial user training (virtual or on-site) for the operation of the milling and measuring tools and its software. 1.12.3 The provider offers an optional set of tools and consumables for the initial commissioning of the device to enable complete sample processing.