Micro-System-Analyser (IMWS-10.1) - PR924107-2690-P

1 Piece Micro-System-Analyser

The Fraunhofer Institute for Microstructure of Materials and Systems IMWS researches the application behavior, reliability, safety and lifetime of innovative materials in components and systems. This tender is for the supply of a Laser-Doppler-Vibrometer (LDV) for dynamic characterization of samples in the micro- to millimeter range, like MEMS structures or micromechanical samples. In addition, quasistatic out-of-plane deformation measurements (e.g. based on interferometric approaches) must be possible. Optional features, software support, documentation, delivery, acceptance testing, and warranty must be included.

Optionen: 1.2.5. Dynamic Measurement System (Scanning Laser Doppler Vibrometer) The device should support displacement / vibration measurements in the frequency range greater 1.2 Ghz (up to 2 GHz or higher (larger specified frequency ranges are rated higher) 1.2.9. Dynamic Measurement System (Scanning Laser Doppler Vibrometer) "Optional External Signal Generator: An external vector signal generator may optionally be included to electrically stimulate samples at high frequencies. The device shall be capable of generating accurate and stable signals suitable for dynamic characterization. It shall provide a high-power output of at least +30 dBm, a modulation bandwidth of at least 1 GHz, and frequency coverage from at least 10 kHz to 2.4 GHz." 1.2.12. Dynamic Measurement System (Scanning Laser Doppler Vibrometer) Additional microscope objectives for LVD measurements (optional to 1.2.11) within a magnification range of 1x-50x should be offered. 1.2.14. Dynamic Measurement System (Scanning Laser Doppler Vibrometer) "Optional External Signal Amplifier: An external RF broadband power amplifier should optionally be included to enable multimodal excitation of samples under test. The amplifier shall operate in class A or AB mode over a frequency range of at least 1 MHz to 200 MHz, with a minimum output power of 40 dBm into a 50 Ohm load. Both input and output impedances shall be 50 Ohm. The amplifier shall exhibit an output distortion of no more than -15 dBc." 1.2.15. Dynamic Measurement System (Scanning Laser Doppler Vibrometer) "Optional High-Speed Signal Acquisition Device: Optionally included should be a device that enables high-resolution sampling of excitation and measured signals during testing and characterization. This can be either an oscilloscope or a high-performance ADC card with the possibility for live viewing within the measurement setup. The device should be capable of 20 GS/s on at least four channels and have an analog bandwidth of at least 2.4 GHz. The input impedance of the analog RF channels should be 50 Ohm. The device should include at least one trigger input line and a synchronization output port. It should also support signal processing features such as basic math operations, spectral analysis, filtering, and averaging options." 1.3.4. Topography measurement for out-of-plane deformation and surface / roughness properties Additional objectives for topography measurements (optional to 1.3.3) within a magnification range of 2.5x-50x should be offered. 1.3.5. Topography measurement for out-of-plane deformation and surface / roughness properties Topography measurements of larger samples should be possible by stitching approaches. In this case, an automatic / electric positioning stage must be included. 1.4.2. "Stages and Sample Handling " An optional motorized or manual tilt stage may be included for angular alignment. 1.4.4. "Stages and Sample Handling " The stage / system should optionally support measurements on wafer level (up to 200 mm) or large planar substrates (e.g. by use of wafer vacuum chuck, universal mounting stage). 1.5.2. Software and Data Management The system should offer automated measurement routines for repetitive tasks as well as scripting or macro programming (e.g., Visual Basic, C#, or similar) for creating custom measurement sequences and performing data analysis. 1.7.1. Miscellaneous 2-year warranty 1.7.3. Miscellaneous Dismantling and trade-in of an old exisiting unit without warranty (Polytec MSA-400 (2006), Laser-Doppler-Vibrometrie, Out-of-plane / In-plane vibration measurement, without table)