Inline Testsystem (IPMS-MRS11.1) - PR860800-2480-P

1 piece: Inline Test System

Process tools to be used for the test of MEMS wafers and devices in a CMOS compatible cleanroom according to class 4 EN ISO 14644-1 production environment. The "Inline Test System" must be usable in three ways. The 1rst option must be a direct docking of the test head onto the prober interface board and the 2nd option is a DUT adapter board directly on the test head and the 3rd option must be a flexible cable interface between the test head and the prober interface board.

Optionale service items: 7.1 Extended Warranty An extended warranty of further 24 months should be offered. During the warranty period all support, repair and parts cost should be covered. Yes 12.2 Mixed-Signal Channels Channels: Extendable to at least "3072 Channels Rating: 100% highest value , 20% smallest value" 12.4 Mixed-Signal Channels Data rate: Extendable to at least (per channel) "5 Gbps Rating: 100% highest value , 20% smallest value" 12.6 Mixed-Signal Channels Pattern Memory: Extendable @ 1.6 Gbps to (all channels) "≥ 800 M Vectors Rating: 100% highest value , 20% smallest value" 13.2 Supply-Channels (High Power) Channel count extendable to at least "32 Channels Rating: 100% highest value , 20% smallest value" 14.2 Supply-Channels (High Resolution) Channel count extendable to at least "192 Channels Rating: 100% highest value , 20% smallest value" 22.2 Software Requirements Storing of the measured data as ASCII-file, STDF or similar format, evaluable with user defined software YES