Inline 300 mm full wafer XRR (IPMS_CNT07.1) - PR878911-2480-P

1 Inline 300 mm full wafer XRR

An X-ray diffractometer suitable for the analysis of 300mm full wafer semiconductor samples in a complete clean room environment. The X-ray diffractometer is intended for clean room operation in the semiconductor area for diffraction measurement (XRD), grazing incidence diffraction measurement (GIXRD), reflectometry measurements (XRR), wide angle XRD (WAXRD) for texture and stress measurements, High-resolution diffraction measurement (HRXRD) and reciprocal space mapping (RSM) on wafers with diameters of 300 mm and 200 mm, with a fully automatic load port and all necessary subsystems (e.g. cooler). Details can be found in the tender documents.

optional service items: 21.1 Loadport Please offer a second load port if not already available as a version of the system. "Please specify as an option. If a second load port is offered, the full number of points will be awarded, otherwise 0 points will be awarded." 21.2 In plane detector Please offer an in-plane detector that is compatible with the system required in the specifications. "Please specify as an option and whether it can be retrofitted at a later date!

If the detector is offered, the full number of points will be awarded, otherwise 0 points will be awarded" 21.3 1D detector Please offer a 1D detector that is compatible with the system required in the specifications. "Please specify as an option and whether it can be retrofitted at a later date!

If the detector is offered, the full number of points will be awarded, otherwise 0 points will be awarded" 21.4 Grain sizes / microelongation If not already included in the main quotation, please provide software compatible with the required equipment to calculate grain sizes & microstrain. "Please specify as an option. If software is offered, the full number of points will be awarded, otherwise 0 points will be awarded." 21.5 Extended Warranty Please offer to extend the warranty by a further 12 months. "Please specify as an option. If an extension of the warranty is offered, the full number of points will be awarded, otherwise 0 points will be awarded."