High resolution inline electron microscope (IPMS-CNT09.1; IPMS-CNT09.4, IPMS-CNT09.5) - PR870350-2480-P

1 piece High resolution inline electron microscope bestehend aus Main unit incl.detectors & cameras (IPMS-CNT09.1), Enclosures, compressors & chiller (IPMS-CNT09.4) und Non-conductive material coating (optional; IPMS-CNT09.5)

The tender specification (TS) describes the requirements of a high resolution electron microscope capable of analyses of semiconductor samples in full clean room environment (CRE - inline). The electron microscope consists of the main unit with electron column, source, chamber, stage, several attached electron detectors as well as cameras for HR-imaging, elemental & diffraction analysis, which enables the full spectrum of characterization and reliability tests. Cooling unit/s, compressors, pumps and electronic units ensure vacuum for the electron column as well as precise and stable operating conditions for the system. Several enclosures act as barrier for disturbing outside factors like EMR interference and acoustic/mechanical vibrations.

Optional service items: 17.1 Extended warranty Extension of the warranty of further 12 months. 17.2 Vibration compensation Integrated or external system option to minimize disturbances due to e.g. floor vibrations 17.3 EMI compensation Integrated or external system option to minimize disturbances due to EMI 17.4 Precession electron diffraction (PED) Optional system components to carry out PED on the main system; Hardware & Software - Please state which components can be upgraded to a later point and which not. 17.5 Electron holography (EH) Optional system components to carry out electron holography on the main system; Hardware & Software - Please state which components can be upgraded to a later point and which not. 17.6 Strain analysis (SA) Optional system components to carry out strain analysis on the main system; Hardware & Software - Please state which components can be upgraded to a later point and which not. 17.7 NanoBeam diffraction (NBD) Optional system components to carry out nano beam diffraction experiments on the main system; Hardware & Software - Please state which components can be upgraded to a later point and which not. 17.8 Field free mode (Lorentz) Optional system components allowing field-free imaging in STEM and TEM mode. Differentiate between corrected Version for STEM and uncorrected version in quotation. Hardware & Software - Please state which components can be upgraded to a later point and which not. 17.9 Additional Alignment option Further alignment of HT value at the factory beside the included ones 17.10 "Additional Scan Controller (REVOLON TEM Scan Controller pointElectronic GmbH)" Independent control of image scanning options during STEM-analysis; Please state compatibility and integration. 17.11 Alternative camera and/or detector solution 4D-STEM (Quantum Detectors: Merlin EM) Alternative solution to inluded one; integration must be possible (compatibility); 17.12 Alternative camera Imaging/4D-STEM (Dectris: ARINA) Alternative solution to inluded one; integration must be possible (compatibility); 19.1 "Non-conductive material coating (Quantum Design: Q150V - ESPlus)" Sputter coating system for C & metal deposition regarding sample preparation of non-conducting samples. Please include Carbon-Rod Head, Thickness monitoring, Table for angle adjustment and W-Target/s as sputter metal. 19.2 "Non-conductive material coating (Leica Microsystems: EM ACE600)" Sputter coating system for C & metal deposition regarding sample preparation of non-conducting samples. Please include Glow Discharge Unit, Table with 3 motorized axes and W-target/s as sputter metal.