CMP Upgrade Reflexion 3 (IPMS-CNT11.1) - PR880735-2480-P

1 Piece CMP Upgrade Reflexion 3

The basis of the scope of services is the CMP system Reflexion LK from Applied Materials (S/N 410249) , which is already located in the 300 mm CMOS cleanroom at Fraunhofer IPMS, is at the so-called 'Generation 3’ status. The planned system upgrade to 'Generation 5’ will bring all handling robots within the system and the control software up to the latest standard. To estimate the amount of work required, AMAT carried out a tool audit on site before the tender. This update makes it possible to order spare parts for the system. This is the basis for the required system availability.

optional sevice items: 2.3.22 IT/Security A separate WIN10/11-based installation (hardware/software) for recipe creation/edition is also supplied with the tool software 2.3.27 Security The risk assessments for the system are available from the manufacturer. 3.4 Motor Cable Exchange of motor cables possible if needed based on audit result 3.5 Factory Interface Robot Exchange of Factory interface Robot possible if needed based on audit result 3.6 Wet Robot Exchange of Wet Robot possible if needed based on audit result 5.5.1 Warranty extension Extension of the warranty of further 12 months.