300mm XRD (IPMS-CNT07.2) - PR904697-2480-P

1 piece 300mm XRD

An X-ray diffractometer that is suitable for analysing 300mm full-wafer semiconductor samples and wafer fragments. The equipment has a high requirement for flexibility in order to carry out a large number of different tests with different test setups. The X-ray diffractometer is suitable for laboratory use in the semiconductor field for grazing incidence diffraction measurements (GI XRD), reflectometry measurements (XRR), pole figure and texture measurements, high resolution diffraction measurements (HRXRD) and stress analyses for 300mm and 200mm wafers, as well as for silicon wafer fragments, and is equipped with all necessary subsystems (e.g. cooler).

optional service items: 19.1 Microfocus source Please offer a microfocus source that is compatible with the system requested in the specifications. "< 1mm² Please specify as an option and whether it can be retrofitted at a later date! If a microfocus source is offered, the full number of points will be awarded, otherwise 0 points will be awarded"

19.2 In plane detector Please offer an in-plane detector that is compatible with the system required in the specifications. "Please specify as an option and whether it can be retrofitted at a later date! If the detector is offered, the full number of points will be awarded, otherwise 0 points will be awarded"

19.3 "RSM - Reciprocal space map -" "Please offer the appropriate equipment, whether hardware and/or software, which enables RSM to be recorded and analysed and which is compatible with the system required in the specifications. The software included must be able to visualise the RSM data and export it in a suitable format." "Please specify as an option and whether it can be retrofitted at a later date! If equipment is offered, the full number of points will be awarded, otherwise 0 points will be awarded"

19.4 Grain sizes / microelongation If not already included in the main quotation, please provide software compatible with the required equipment to calculate grain sizes & microstrains. "Please specify as an option. If software is offered, the full number of points will be awarded, otherwise 0 points will be awarded."

19.5 Extended texture and pole figure measurement Please provide the measurement scripts, allowing automatic texture and pole figure measurements "mapping" to be performed over the entire 300mm sample stage range. "Please specify as an option and whether it can be retrofitted at a later date! If software is offered, the full number of points will be awarded, otherwise 0 points will be awarded."

19.6 Extended HRXRD measurement Please provide the measurement scripts or describe the procedure whereby automatic HRXRD measurements "mapping" can be performed over the entire 300mm sample stage range. "Please specify as an option and whether it can be retrofitted at a later date! If software is offered, the full number of points will be awarded, otherwise 0 points will be awarded."

19.7 Extended Warranty Please offer to extend the warranty by a further 12 months. "Please specify as an option. If an extension of the warranty is offered, the full number of points will be awarded, otherwise 0 points will be awarded."

19.8 High temperature XRD Please offer a tool-specific system for high-temperature measurements of wafer fragments that is compatible with the system required in the specifications. "0°C to 1100°C Please specify as an option and whether it can be retrofitted at a later date! If a high-temperature oven is offered, the full number of points will be awarded, otherwise 0 points will be awarded."